Component Cleaning - Science Based Solutions

BOC Edwards Kachina is the industry leader in comprehensive process chamber component cleaning and lifecycle management solutions to the semiconductor and compound semiconductor industries. By combining industry experience, leading-edge technology, and quality-oriented solutions that our customers can reliably trust, BOC Edwards Kachina can extend the useful life of your process chamber components and drive down your total cost of ownership year over year.

Our Science Based SolutionsTM for tool components provide carefully-engineered technologies such as selective chemical stripping, controlled thermal ramp, arc and plasma spray coatings, as well as combinations of such technologies to achieve a contamination-free surface devoid of dangerous mobile ions and capable of achieving longer component life than typically achievable by other mechanical cleaning processes. This same engineering focus assures that key tool subassemblies such as heater pedestals and e-chucks and chamber liners deemed beyond their useful life are recycled and returned to you, in many cases multiple times, with as-new functionality and critical dimensions, thus yielding significant CoO-related savings. Our component management offerings will drive down tool CoO in all of your most important process applications in PVD, CVD, etch, and ion implant as well as in specific compound semiconductor areas such as MOCVD, phosphorous traps, and RIE / ICP plasma etch.

We are also leveraging BOC Edwards' worldwide reputation for vacuum and particulate management expertise in offering an industry first in the cleaning and lifecycle management of the entire set of chamber and vacuum components exposed to your most aggressive process conditions. Our Science-Based SolutionsTM are closely integrated with BOC Edwards vacuum component management best-known methods to yield an exciting, new full solution to your tool equipment support needs for reduced particulate generation. Call your BOC Edwards representative to get additional information and details on this and all of our tool component service offerings.

Quality Control Systems: ECAR, MOC, and ISO9000:2000

Advanced Coating Technologies Improve Process Chamber Performance
By Jeremy Epton of BOC Edwards
Semiconductor FabTech (24th Edition)
Read this article or request a hard copy.

Download Component Cleaning for Compound Semiconductor Industry Datasheet