Integrated Vacuum & Abatement - Exhaust Management

The Zenith range is a ground breaking series of process-specific combined vacuum and exhaust management systems, providing enhanced safety, process tool compatibility, minimum footprint and reduced cost of ownership. Developed in cooperation with the OEMs to assure appropriate pumping and abatement solutions, a centralized control strategy allows for energy conservation through 'Active Utility Control'. As a single extracted cabinet with single utility connection Zenith represents the most cost-effective method of providing protection in the event of leakage as only one extraction connection is required compared to multiple enclosures. Other benefits include lower installation costs, shorter installation time and full compliance to national and international electrical and safety standards and SEMI^® S2-0303.

To request additional application-specific product data, please submit an exhaust management inquiry.