BOC Edwards is a world leader in providing support equipment solutions for the semiconductor, solar and flat panel display industries. Our technical experts work closely with leading process system manufacturers to develop innovative products required to meet critical performance challenges. Our global service network ensures that you have local support around the world.

Vacuum Technology
  • On-tool, proximity and remote vacuum pumps
  • Turbomolecular pumps
  • Chillers
  • Measurement instrumentation

    • Exhaust Management
  • Exhaust gas management systems
  • Integrated vacuum and abatement systems
  • Liquid abatement systems for metals and acids

    • Chemical Management
  • Bulk chemical delivery solutions
  • Slurry blending and distribution systems
  • On-tool liquid process solutions
  • Wet process benches

    • Support Services
  • Comprehensive on-site services
  • 24/7 field service support
  • Equipment diagnostics and predictive monitoring
  • Parts cleaning and component management
  • Equipment repair and maintenance
  • Refurbished equipment


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