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Edwards Site Map
BOC Edwards
BOC Edwards is a leading supplier to the world's most advanced industries
including semiconductor, compound semiconductor, chemical, pharmaceutical,
metallurgy, scientific instrumentation and research & development.
About
BOC Edwards
BOC Edwards is a value-added supplier of gases and equipment for the world's
most advanced manufacturing industries.
BOC
Group
The BOC Group plc is a global industrial gas company. It is a public limited
company listed on the London and New York stock exchanges and registered
in England.
Contacting
BOC Edwards
Contact BOC Edwards.
BOC Edwards Products
Bulk
Gases
BOC Edwards leads the field in nitrogen generator technology advances.
Our plants combine industry-leading purity levels with a compact modular
design, meeting both the SIA technology roadmap and economic drivers.
- On
site Generation
- Bulk
Gas Products
- Supercritical
CO2
Chemical
Management
BOC Edwards is a leading supplier of high-purity chemical and slurry distribution
systems for semiconductor device and manufacturing equipment customers.
- Chemical
Blend and Dispense
- Copper
Technologies
- Flow
Control
- Liquid
Abatement Solutions
- Mobile
Chemical Management Systems
- Slurry
Blending & Distribution
- Waste
Collection
- Wet
Process OEM Systems
- Tech
Library
Chillers
The BOC Edwards TCU 40/80 and TCU 40/80 Plus chillers are designed to
meet the stringent requirements for the cooling of wafers during etch
or other semiconductor processes. They are suited to all processes - typical
applications include the cooling of electrostatic chucks, quartz windows,
chamber domes and walls.
Electronic
Materials
BOC Edwards is a premier process gas and gas systems supplier to the global
silicon semiconductor, compound semiconductor and flat panel display industries.
Our products meet or exceed the stringent requirements of these demanding
markets and are backed by the extensive process knowledge and technical
expertise afforded by over 100 years of leadership in gas production and
supply.
- Analytical
Quality Systems
- Bulk
Processes Gases
- Cylinder
Process Gases
- Gas
Production
- On
Site Fluorine Generation
- On
Site Purification Plants
- Supercritical
CO2
Exhaust
Management
BOC Edwards is unique in offering the broadest range of exhaust management
technologies, demonstrated in a series of products and systems designed
to meet all customer requirements - from low-cost facility management
to full environmental protection.
- Compound
Semiconductor
- Semiconductor
- Liquid
Abatement Solutions
Gas
Delivery
BOC Edwards offers a range of gas delivery solutions to meet all customer
needs, including gas cabinets, bulk supply schemes and on-site gas generation.
- Bulk
Special Gas Systems
- Gas
Cabinets
- Gas
Distribution Manifolds
- Gas System
Design
BOC
Edwards Instrumentation
BOC Edwards offers a host of vacuum measurement products, including active
gauges, controllers and displays, as well as a series of market-specific
semiconductor instrumentation branded FabSense™. The function of
measurement instrumentation is to afford customers an at-a-glance view
of their entire manufacturing process, closely monitoring material quality,
equipment performance and process status.
- Vacuum
Instrumentation
Pharmaceutical
Systems
BOC Edwards Pharmaceutical Systems specializes in aseptic primary packaging
equipment. From a network of group companies and agents throughout the
world, supported by manufacturing facilities in the USA and Europe, BOC
Edwards provides and supports engineered-to-order solutions to internationally
acknowledged pharmaceutical standards.
- Barrior
Isolation
- Filling
Systems
- Freeze
Drying
- Loading
Systems
Pressure Blowers
Thin
Film Coating
BOC Edwards offers a world class range of coating systems, components
and thin film instrumentation - for R&D and production applications
- particularly in the fields of compound semiconductor, LED, optical components
and opthalmics.
- Opthalmic
Lens Coating
- Thin Film Systems
- Temescal
Products
Vacuum
BOC Edwards is the world leader in vacuum technology for semiconductor,
industrial and scientific applications. The company is engaged in the
development, manufacture and support of a wide range of vacuum pumps,
systems, boosters and accessories based on a number of technologies and
capable of achieving high vacuums down to 10-7 mbar.
- Chemical
Pumps
- Drypumps
- Industrial
Dry pumps
- Leak
Detectors
- Liquid
Ring Pumps
- Measurement
& Control
- Piston
Pumps
- Process Systems
- Pump
Accessories
- Roots
Pumps
- Rotary
Vane Pumps
- Turbomolecular
Pumps
- Valves,
Fittings & Fluids
- Vapour
Diffusion Pumps
BOC Edwards Subsystems
Semiconductor
Subsystems
One of the effects of the protracted downturn in semiconductor markets
has been an increasing focus by manufacturers on added value and greater
efficiencies. To meet and anticipate these needs, BOC Edwards has developed
a range of integrated solutions for end users and OEMs.
- Lithography
Subsystems
BOC Edwards Markets & Applications
Semiconductor
BOC Edwards Semiconductor Device Applications
BOC Edwards Services
Equpment
Maintenance
We have developed a system of Total Customer Support, with a wide choice
of service options and a comprehensive range of spares. All of this is
backed by our world-wide service organisation.
- Exchange
Product
- Field
& On Site
- Product
Remanufacturing
- Service
Agreements & Contracts
Semiconductor
Services
BOC Edwards is one of the world's largest suppliers of gases, vacuum &
exhaust management equipment and chemical management systems to the semiconductor
device, flat panel display and process tool manufacturing industries.
- Component
Cleaning
- Design
& Project Management
- Know
How Services
- Off Site
Services
- On
Site Services
Spare
Parts
BOC Edwards provides a global network of service facilities where equipment
is re-manufactured to the latest factory procedures using original, high
standard components. For those users who prefer to service their own product,
a wide range of spares to a similarly high standard are available.
BOC
Edwards Training
BOC Edwards offers a number of standard and tailored courses at various
locations around the world, and has dedicated training centres located
in the UK and USA.
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