BOC Edwards Site Map

BOC Edwards
BOC Edwards is a leading supplier to the world's most advanced industries including semiconductor, compound semiconductor, chemical, pharmaceutical, metallurgy, scientific instrumentation and research & development.

About BOC Edwards
BOC Edwards is a value-added supplier of gases and equipment for the world's most advanced manufacturing industries.

BOC Group
The BOC Group plc is a global industrial gas company. It is a public limited company listed on the London and New York stock exchanges and registered in England.

Contacting BOC Edwards
Contact BOC Edwards.

BOC Edwards Products

Bulk Gases
BOC Edwards leads the field in nitrogen generator technology advances. Our plants combine industry-leading purity levels with a compact modular design, meeting both the SIA technology roadmap and economic drivers.

- On site Generation
- Bulk Gas Products
- Supercritical CO2

Chemical Management
BOC Edwards is a leading supplier of high-purity chemical and slurry distribution systems for semiconductor device and manufacturing equipment customers.

- Chemical Blend and Dispense
- Copper Technologies
- Flow Control
- Liquid Abatement Solutions
- Mobile Chemical Management Systems
- Slurry Blending & Distribution
- Waste Collection
- Wet Process OEM Systems
- Tech Library

Chillers
The BOC Edwards TCU 40/80 and TCU 40/80 Plus chillers are designed to meet the stringent requirements for the cooling of wafers during etch or other semiconductor processes. They are suited to all processes - typical applications include the cooling of electrostatic chucks, quartz windows, chamber domes and walls.

Electronic Materials
BOC Edwards is a premier process gas and gas systems supplier to the global silicon semiconductor, compound semiconductor and flat panel display industries. Our products meet or exceed the stringent requirements of these demanding markets and are backed by the extensive process knowledge and technical expertise afforded by over 100 years of leadership in gas production and supply.

- Analytical Quality Systems
- Bulk Processes Gases
- Cylinder Process Gases
- Gas Production
- On Site Fluorine Generation
- On Site Purification Plants
- Supercritical CO2

Exhaust Management
BOC Edwards is unique in offering the broadest range of exhaust management technologies, demonstrated in a series of products and systems designed to meet all customer requirements - from low-cost facility management to full environmental protection.

- Compound Semiconductor
- Semiconductor
- Liquid Abatement Solutions

Gas Delivery
BOC Edwards offers a range of gas delivery solutions to meet all customer needs, including gas cabinets, bulk supply schemes and on-site gas generation.

- Bulk Special Gas Systems
- Gas Cabinets
- Gas Distribution Manifolds
- Gas System Design

BOC Edwards Instrumentation

BOC Edwards offers a host of vacuum measurement products, including active gauges, controllers and displays, as well as a series of market-specific semiconductor instrumentation branded FabSense™. The function of measurement instrumentation is to afford customers an at-a-glance view of their entire manufacturing process, closely monitoring material quality, equipment performance and process status.

- Vacuum Instrumentation

Pharmaceutical Systems
BOC Edwards Pharmaceutical Systems specializes in aseptic primary packaging equipment. From a network of group companies and agents throughout the world, supported by manufacturing facilities in the USA and Europe, BOC Edwards provides and supports engineered-to-order solutions to internationally acknowledged pharmaceutical standards.

- Barrior Isolation
- Filling Systems
- Freeze Drying
- Loading Systems

Pressure Blowers

Thin Film Coating

BOC Edwards offers a world class range of coating systems, components and thin film instrumentation - for R&D and production applications - particularly in the fields of compound semiconductor, LED, optical components and opthalmics.

- Opthalmic Lens Coating
- Thin Film Systems
- Temescal Products

Vacuum
BOC Edwards is the world leader in vacuum technology for semiconductor, industrial and scientific applications. The company is engaged in the development, manufacture and support of a wide range of vacuum pumps, systems, boosters and accessories based on a number of technologies and capable of achieving high vacuums down to 10-7 mbar.

- Chemical Pumps
- Drypumps
- Industrial Dry pumps
- Leak Detectors
- Liquid Ring Pumps
- Measurement & Control
- Piston Pumps
- Process Systems
- Pump Accessories
- Roots Pumps
- Rotary Vane Pumps
- Turbomolecular Pumps
- Valves, Fittings & Fluids
- Vapour Diffusion Pumps

BOC Edwards Subsystems

Semiconductor Subsystems
One of the effects of the protracted downturn in semiconductor markets has been an increasing focus by manufacturers on added value and greater efficiencies. To meet and anticipate these needs, BOC Edwards has developed a range of integrated solutions for end users and OEMs.

- Lithography Subsystems

BOC Edwards Markets & Applications

Semiconductor
BOC Edwards Semiconductor Device Applications

BOC Edwards Services

Equpment Maintenance
We have developed a system of Total Customer Support, with a wide choice of service options and a comprehensive range of spares. All of this is backed by our world-wide service organisation.

- Exchange Product
- Field & On Site
- Product Remanufacturing
- Service Agreements & Contracts

Semiconductor Services
BOC Edwards is one of the world's largest suppliers of gases, vacuum & exhaust management equipment and chemical management systems to the semiconductor device, flat panel display and process tool manufacturing industries.

- Component Cleaning
- Design & Project Management
- Know How Services
- Off Site Services
- On Site Services

Spare Parts
BOC Edwards provides a global network of service facilities where equipment is re-manufactured to the latest factory procedures using original, high standard components. For those users who prefer to service their own product, a wide range of spares to a similarly high standard are available.

BOC Edwards Training
BOC Edwards offers a number of standard and tailored courses at various locations around the world, and has dedicated training centres located in the UK and USA.

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Chemical Management - Chillers - Exhaust Management - Instrumentation - Pharmaceutical Systems - Thin Film Coating - Vacuum


BOC Edwards, Inc. is a subsidiary of Edwards Limited. © BOC Edwards, Inc. 2007. All rights reserved.
BOC and the stripe symbol are trade marks of The Linde Group AG.