The pumps are designed so
that they can be upgraded by the addition of a range of accessories. The
accessories are supplied with all the required connections and no special tools
are needed to fit them.
Trapping particulates
In any application, first
ensure that particulates in the process stream are trapped before they get into
the pump: use the ITM or ITF inlet filters, which are suitable for use with
oil-sealed and dry pumps. However, in processes that generate or contain large
amounts of particulates, some will enter the pump: use our EOF an external oil
filter to remove particulates from the pump oil during operation.
ITF inlet dust filters
If the mechanical pump is
a backing pump for a diffusion pump, the diffusion pump will trap particulates
during normal operation, but the diffusion pump will not trap dust during the
roughing stage of the process cycle. We recommend you fit an ITF filter to the
mechanical pump inlet (that is, in the foreline): this filter has a replaceable
element. Note that the impedance of a clean filter will cause the pumping speed
to decrease by about 10% at 1mbar and 20% at 10-2 mbar. The ITF filter is more
that 96% efficient, when tested in accordance with BS2831.
ITM high capacity inlet
dust filters
Use an ITM filter for applications
where there is a high load of dust and particulates. Fit the ITM directly to
the inlet of a rotary or mechanical booster pump. This filter has a stainless
steel mesh element that can be washed and re-used. It is ideal for use when
backing diffusion pumps or for wet processes where a paper filter may become
blocked quickly. The ITM filter has high conductance and is therefore ideal
for applications that require fast pump down times. The ITM filter has an
efficiency of 90%, when tested in accordance with BS3831.
EOF external oil filters
Use the EOF filters with
the EM oil-sealed rotary pumps, to remove particulates trapped in the pump oil.
There are two types of EOF filters.
The EOFA and EOFM filters
use the internal pressurized oil system of the pump to continually filter a
proportion of the pump oil. These filters are only suitable for hydrocarbon
oil. The EOFM filter removes particulates down to 0.5 microns, and the EOFA
filter both removes particulates and includes an active element to remove acidic
and other aggressive contaminants from the oil.
EOF pumped external oil
filters have their own oil re-circulation pump. The re-circulation pump has a
high flow rate and allows large quantities of oil to be filtered. The filter is
fitted with a gauge, which indicates when the filter needs to be changed. This
filter is suitable for hydrocarbon and PFPE oils.
Pumping vapors
The use of gas ballast
significantly improves vapor-handling capability of oil sealed rotary pumps. We
offer a number of accessories to improve the utility of gas ballast.
EBV gas ballast control
valve
Fit EBV gas ballast
control valve to allow remote or automated control of gas ballast.
TCV temperature control
valve
Fitting a TCV can enhance
the vapor pumping performance of the larger oil sealed pumps. Use the TCV both
to warm-up the pump faster (which reduces the amount of condensation in the
pump) and to reduce water usage and cost.
ITC inlet chemical traps
Fit an ITC trap to the
inlet of the pump to protect against the aggressive process vapors that may
corrode the pump or degrade the oil.
Trapping liquids
The use of gas ballast
allows an oil-sealed pump to process significant quantities of vapor. However,
oil sealed pumps can not pump liquid streams and it is important both to remove
liquids before they reach the pump inlet and to prevent condensed liquids from
flowing back into the pump outlet. The following accessories may be suitable
for your application:
ITO inlet trap
The ITO inlet trap is
ideal for processes where there is a risk of liquids in the process entering
the pump inlet. Fit the ITO trap to the pump inlet or elsewhere in the
foreline.
CP catchpot
Process vapors passing
through the pump may condense after the pump outlet, in the exhaust line. Fit a
CP catchpot to the pump outlet to trap the condensation and prevent them
flowing back into the pump.
Exhaust management
You should aim to
minimize the impact of gases and vapors that exhaust from the pump outlet. BOC
Edwards offers a range of exhaust management systems for the most exacting
applications However, for most straightforward applications of oil sealed
rotary pumps, we recommend that you fit an oil mist filter to the pump outlet
to remove oil mist vapor. A mist filter is not required if you vent the exhaust
gases remotely or pass them through exhaust scrubbing equipment.
MF oil mist filters
The MF filters remove oil
mist (vapor) from the process gases exhausted from the outlet of an oil sealed
pump. The filters remove both odor and oil vapor and so prevent it from
reaching the atmosphere and the workplace.
Back migration
When operated at ultimate
pressure for extended periods of time, any oil-sealed pump allows oil vapor to
back migrate into the process chamber. The back-migration of oil vapor could
contaminate your process or your vacuum system.
ITC inlet chemical trap
Fit an ITC inlet chemical
trap (filled with an alumina charge) to the pump inlet to trap oil vapor and to
prevent back migration.
Spares
The clean and overhaul
kit contains all of the springs, gaskets, seals and other components required
for routine maintenance and seals and other components required for routine
maintenance and whenever the pump is dismantled. Add a blade kit for a full
service. The major service kit contains gaskets, seals, filters, bearings and
other components required for a complete service after prolonged operation or
after pumping corrosive or gases and vapors.
·
Clean and overhaul kit
·
E2M80 blade kit
·
E2M80 major service kit