Vacuum Technology

BOC Edwards is a world leader in vacuum technology for high-tech applications such as industrial, chemical, pharmaceutical, scientific, semiconductor, compound semiconductor and flat panel. We are engaged in the development, manufacture and support of a wide range of vacuum pumps, systems, boosters and accessories. Our vacuum equipment is capable of achieving high vacuums down to 10^-7 mbar. All BOC Edwards equipment is supported by applications expertise, dedication to continual research and development and backed by world-class services.

BOC Edwards pioneered the oil-free 'dry' pump, originally for the semiconductor industry and subsequently for other industrial processes and now markets a series of dry pumps using claw, roots, scroll and combined mechanisms. Other pumping technologies include, but are not limited to rotary vane, vapor diffusion and turbomolecular.

Vacuum Pumps and Systems

• Chemical Pumps
• Dry Vacuum Pumps
• Industrial Pumping Systems
• Liquid Ring Vacuum Pumps
• Mechanical Vacuum Boosters
• Rotary Piston Pumps
• Oil-Sealed Pumps
• Turbomolecular Pumps
• Vacuum Dryers
• Measurement and Control
• Vacuum Components (valves, fluids, fittings)
• Small Vapor Diffusion Pumps
• Large Vapor Diffusion Pumps

Download Vacuum & Pressure for Industrial & Process Applications Brochure

BOC Edwards, Inc. is a subsidiary of Edwards Limited. © BOC Edwards, Inc. 2007. All rights reserved.
BOC and the stripe symbol are trade marks of The Linde Group AG.